The ALICAT 21 series standard mass flow controller in the United States uses internal compensation laminar pressure difference technology to maintain laminar flow of gas over a large flow range. The built-in absolute pressure and temperature sensors fully compensate for the difference between volumetric flow rate and mass flow rate caused by pressure and temperature, and correct the user's standard operating conditions. Possess NIST traceable calibration certificate.

It can be used to quickly and accurately measure and control the mass flow rate, volume flow rate, pressure of process gas, and display gas temperature, suitable for various flow measurement and control occasions. The equipment adopts fast and stable high-quality solenoid valves and optimized PID tuning, which can achieve a control speed of over 100 ms and maintain excellent stability. There are also ultra-low voltage loss products available for you to choose from.

Product Features

● Digital products

● Multi parameter display and output: temperature, pressure, flow rate, etc

● Multi parameter control, such as volumetric flow rate, mass flow rate, and pressure

Three control methods are standard: digital, analog, and local panel

Optional high accuracy: better than 0.5% reading

● Wide controllable range ratio, 0.01~100% of full scale

Fast response time, better than 30 ms

● Built in 98 gases

● Can edit mixed gases on site (up to 5 components) and store up to 20 mixed gases

Precision upgrade

The range is 0.5 SCCM -6000 SLPM,

Among them, the range range of 10 SCCM to 20 SLPM is upgraded with the following indicators:

Normal accuracy of mass flow rate ± 0.6% reading or ± 0.1% full scale (taking the maximum value)

High precision ± 0.5% reading of mass flow rate or ± 0.1% full scale (taking the maximum value)

Repeatability ± (0.1% reading+0.02% full scale)

Zero drift of mass flow rate ± 0.01% of full scale/℃ (starting from 25 ℃)

± 0.01% of full scale/Atm (starting from calibrated pressure)

Mass flow range drift ± 0.01% reading/℃ (starting from 25 ℃)

± 0.1% reading/Atm (starting from calibrated pressure)

Technical indicators

The medium requires non corrosive, clean, and dry gases

98 types of gases are built-in for the medium type, please refer to the gas compatibility table

All gases are built-in to one device, and users can choose on site

Range from 0-0.5 SCCM to 0-6000 SLPM

Range controllable ratio (steady-state) 0.01~100% of full scale

Maximum display flow rate 128% of full scale

Maximum controllable flow rate 102.4% of full scale

Screen refresh rate 10Hz

Digital input/output signals RS232, RS485, Modbus RTU (RS232/RS485), Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, Profibus

Analog input/output signals 0-5 VDC, 1-5 VDC, 0-10 VDC, 4-20 mA

Optional second analog output mass flow rate, volumetric flow rate, pressure, temperature

Analog signal accuracy adds an additional ± 0.1% of full scale error to the basic error